Synthesis, Fabrication and Characterization of ZnO-Based Thin Films Prepared by Sol–Gel Process and H{sub 2} Gas Sensing Performance

Journal Article · Fri Jun 15 04:00:00 EDT 2018 · Journal of Materials Engineering and Performance

DOI:https://doi.org/10.1007/S11665-018-3284-Z· OSTI ID:22860468

Dey, Anup; Roy, Subhashis; Sarkar, Subir Kumar ^[1]

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1. Jadavpur University, Department of Electronics and Telecommunication Engineering (India)

In this paper, an attempt is made to deposit ZnO thin films using sol–gel process followed by dip-coating method on p-silicon (100) substrates for intended application as a hydrogen gas sensor owing to the low toxic nature and thermal stability of ZnO. The thin films are annealed under annealing temperatures of 350, 450 and 550 °C for 25 min. The crystalline quality of the fabricated thin films is then analyzed by field-emission scanning electron microscopy and transmission electron microscope. The gas sensing performance analysis of ZnO thin films is demonstrated at different annealing temperatures and hydrogen gas concentrations ranging from 100 to 3000 ppm. Results obtained show that the sensitivity is significantly improved as annealing temperature increases with maximum sensitivity being achieved at 550 °C annealing temperature and operating temperature of 150 °C. Hence, the modified ZnO thin films can be applicable as H{sub 2} gas sensing device showing to the improved performance in comparison with unmodified thin-film sensor.

• OSTI ID: 22860468
• Journal Information: Journal of Materials Engineering and Performance, Journal Name: Journal of Materials Engineering and Performance Journal Issue: 6 Vol. 27; ISSN 1059-9495; ISSN JMEPEG
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
COATINGS
COMPARATIVE EVALUATIONS
DIP COATING
FIELD EMISSION
HYDROGEN
P-TYPE CONDUCTORS
SCANNING ELECTRON MICROSCOPY
SENSITIVITY
SENSORS
SILICON
SOL-GEL PROCESS
SUBSTRATES
SYNTHESIS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
ZINC OXIDES