Formation of Porous Germanium Layers by Silver-Ion Implantation

Journal Article · Sun Apr 15 00:00:00 EDT 2018 · Technical Physics Letters

DOI:https://doi.org/10.1134/S1063785018040260· OSTI ID:22786477

Vorob’ev, V. V. ^[1]; Nuzhdin, V. I.; Valeev, V. F. ^[2]; Osin, Yu. N. ^[1]

---

1. Kazan Federal University, Interdisciplinary Center for Analytical Microscopy (Russian Federation)
2. Russian Academy of Sciences, Kazan E.K. Zavoisky Physical Technical Institute, Kazan Scientific Center (Russian Federation)

We propose a method for the formation of porous germanium (P-Ge) layers containing silver nanoparticles by means of high-dose implantation of low-energy Ag{sup +} ions into single-crystalline germanium (c-Ge). This is demonstrated by implantation of 30-keV Ag{sup +} ions into a polished c-Ge plate to a dose of 1.5 × 10{sup 17} ion/cm{sup 2} at an ion beam-current density of 5 μA/cm{sup 2}. Examination by high-resolution scanning electron microscopy (SEM), atomic-force microscopy (AFM), X-ray diffraction (XRD), energy-dispersive X-ray (EDX) microanalysis, and reflection high-energy electron diffraction (RHEED) showed that the implantation of silver ions into c-Ge surface led to the formation of a P-Ge layer with spongy structure comprising a network of interwoven nanofibers with an average diameter of ∼10–20 nm Ag nanoparticles on the ends of fibers. It is also established that the formation of pores during Ag{sup +} ion implantation is accompanied by effective sputtering of the Ge surface.

• OSTI ID: 22786477
• Journal Information: Technical Physics Letters, Vol. 44, Issue 4; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7850
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
ATOMIC FORCE MICROSCOPY
BEAM CURRENTS
CURRENT DENSITY
ELECTRON DIFFRACTION
FIBERS
GERMANIUM
ION IMPLANTATION
KEV RANGE 10-100
LAYERS
MICROANALYSIS
MONOCRYSTALS
NANOFIBERS
NANOPARTICLES
POROUS MATERIALS
REFLECTION
RESOLUTION
SCANNING ELECTRON MICROSCOPY
SILVER IONS
X-RAY DIFFRACTION