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Title: A study of the effect of electron and proton irradiation on 4H-SiC device structures

Journal Article · · Technical Physics Letters
 [1];  [2];  [1];  [2]
  1. Russian Academy of Sciences, Ioffe Physical Technical Institute (Russian Federation)
  2. Peter the Great St. Petersburg Polytechnic University (Russian Federation)

The changes of the current–voltage characteristics and the uncompensated donor-impurity concentration (N{sub d}–N{sub a}) in the base electrode of Schottky diodes and JBS diodes based on 4H-SiC have been studied upon their irradiation with 0.9-MeV electrons and 15-MeV protons. The carrier-removal rate was 0.07–0.15 cm{sup –1} under electron irradiation and 50–70 cm{sup –1} under proton irradiation. It was shown that the current–voltage characteristics of the devices under study remain rectifying at electron irradiation doses of up to ~1017 cm{sup –2}. It was demonstrated that the radiation hardness of the SiC-based devices under study substantially exceeds that of silicon p–i–n diodes with similar breakdown voltages.

OSTI ID:
22784018
Journal Information:
Technical Physics Letters, Vol. 43, Issue 11; Other Information: Copyright (c) 2017 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7850
Country of Publication:
United States
Language:
English