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Title: Air-Oxidation of Nb Nano-Films

Abstract

X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.

Authors:
; ; ; ;  [1];  [2]; ; ;  [3]
  1. National Research University MPEI (Russian Federation)
  2. Chalmers University of Technology (Sweden)
  3. IFW Dresden, Institute for Metallic Materials (Germany)
Publication Date:
OSTI Identifier:
22749940
Resource Type:
Journal Article
Journal Name:
Semiconductors
Additional Journal Information:
Journal Volume: 52; Journal Issue: 5; Other Information: Copyright (c) 2018 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7826
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; OXIDES; THICKNESS; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Lubenchenko, A. V., E-mail: LubenchenkoAV@mpei.ru, Batrakov, A. A., Ivanov, D. A., Lubenchenko, O. I., Lashkov, I. A., Pavolotsky, A. B., Schleicher, B., Albert, N., and Nielsch, K. Air-Oxidation of Nb Nano-Films. United States: N. p., 2018. Web. doi:10.1134/S1063782618050196.
Lubenchenko, A. V., E-mail: LubenchenkoAV@mpei.ru, Batrakov, A. A., Ivanov, D. A., Lubenchenko, O. I., Lashkov, I. A., Pavolotsky, A. B., Schleicher, B., Albert, N., & Nielsch, K. Air-Oxidation of Nb Nano-Films. United States. doi:10.1134/S1063782618050196.
Lubenchenko, A. V., E-mail: LubenchenkoAV@mpei.ru, Batrakov, A. A., Ivanov, D. A., Lubenchenko, O. I., Lashkov, I. A., Pavolotsky, A. B., Schleicher, B., Albert, N., and Nielsch, K. Tue . "Air-Oxidation of Nb Nano-Films". United States. doi:10.1134/S1063782618050196.
@article{osti_22749940,
title = {Air-Oxidation of Nb Nano-Films},
author = {Lubenchenko, A. V., E-mail: LubenchenkoAV@mpei.ru and Batrakov, A. A. and Ivanov, D. A. and Lubenchenko, O. I. and Lashkov, I. A. and Pavolotsky, A. B. and Schleicher, B. and Albert, N. and Nielsch, K.},
abstractNote = {X-ray photoelectron spectroscopy (XPS) depth chemical and phase profiling of air-oxidized niobium nanofilms has been performed. It is found that oxide layer thicknesses depend on the initial thickness of the niobium nanofilm. The increase in thickness of the initial Nb nano-layer is due to increase in thickness of an oxidized layer.},
doi = {10.1134/S1063782618050196},
journal = {Semiconductors},
issn = {1063-7826},
number = 5,
volume = 52,
place = {United States},
year = {2018},
month = {5}
}