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Composition and optical properties of amorphous a-SiO{sub x}:H films with silicon nanoclusters

Journal Article · · Semiconductors
;  [1]; ; ; ; ;  [2]
  1. Russian Academy of Sciences, Ioffe Physical–Technical Institute (Russian Federation)
  2. Voronezh State University (Russian Federation)
The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide (a-SiO{sub x}:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ∼50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ∼3.2–3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5–4.7 nm in size in these films, depending on the film composition.
OSTI ID:
22645614
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 2 Vol. 50; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English