Nanofabrication and Demonstration of a Direct‐Write Microevaporator

Doi, Xella; Nittala, Pavani Vamsi Krishna; Fu, Brian; Latt, Kyaw Zin; Mishra, Suryakant; Silverman, Luke; Woodard, Linus; Divan, Ralu; Guha, Supratik

doi:10.1002/smsc.202300121

Title: Nanofabrication and Demonstration of a Direct‐Write Microevaporator

Journal Article · Fri Dec 22 00:00:00 EST 2023 · Small Science

DOI:https://doi.org/10.1002/smsc.202300121· OSTI ID:2263288

Doi, Xella ^[1]; Nittala, Pavani Vamsi Krishna ^[1]; Fu, Brian ^[1]; Latt, Kyaw Zin ^[1]; Mishra, Suryakant ^[2]; Silverman, Luke ^[1]; Woodard, Linus ^[1]; Divan, Ralu ^[3];

^[4]

Pritzker School of Molecular Engineering University of Chicago Chicago IL 60637 USA
Materials Science Division Argonne National Laboratory Lemont IL 60439 USA
Center for Nanoscale Materials Argonne National Laboratory Lemont IL 60439 USA
Pritzker School of Molecular Engineering University of Chicago Chicago IL 60637 USA, Materials Science Division Argonne National Laboratory Lemont IL 60439 USA

Direct‐write vapor deposition is a new technique that would enable one‐step 3D maskless nanofabrication on a variety of substrates. A novel silicon chip‐based microevaporator is developed that allows evaporant to exit through 2000–300 nm nozzles while held at distances comparable to the nozzle diameter from the substrate by a three‐axis nanopositioning stage in vacuum. This results in a localized deposition on the substrate, which may be scanned relative to the substrate to produce direct‐write patterns. The performance of the microevaporator is tested by creating localized depositions of various materials and the line‐writing potential is demonstrated. The relationship between linewidth and source‐to‐substrate distance is investigated by the application of Knudsen's cosine law and Monte‐Carlo simulations, and then utilized to approximate the source‐to‐substrate distance from performed depositions.

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Sponsoring Organization:: USDOE

OSTI ID:: 2263288

Alternate ID(s):: OSTI ID: 2263290

Journal Information:: Small Science, Journal Name: Small Science Vol. 4 Journal Issue: 2; ISSN 2688-4046

Publisher:: Wiley Blackwell (John Wiley & Sons)Copyright Statement

Country of Publication:: Germany

Language:: English

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