Electron and ion kinetics in three-dimensional confined microwave-induced microplasmas at low gas pressures

Journal Article · Fri Apr 15 00:00:00 EDT 2016 · AIP Advances

DOI:https://doi.org/10.1063/1.4948414· OSTI ID:22611645

Tang, Jiali; Yu, Xinhai; Tu, Shan-Tung; Wang, Zhengdong ^[1]; Wang, Zhenyu ^[2]

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1. Key Laboratory of Pressure Systems and Safety, Ministry of Education, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai (China)
2. Integrated Micro & Nano System Engineering Center, School of Software and Microelectronics at Wuxi, Peking University (China)

The effects of the gas pressure (p{sub g}), microcavity height (t), Au vapor addition, and microwave frequency on the properties of three-dimensional confined microwave-induced microplasmas were discussed in light of simulation results of a glow microdischarge in a three-dimensional microcavity (diameter d{sub h} = 1000 μm) driven at constant voltage loading on the drive electrode (V{sub rf}) of 180 V. The simulation was performed using the PIC/MCC method, whose results were experimentally verified. In all the cases we investigated in this study, the microplasmas were in the γ-mode. When p{sub g} increased, the maximum electron (n{sub e}) or ion density (n{sub Ar+}) distributions turned narrow and close to the discharge gap due to the decrease in the mean free path of the secondary electron emission (SEE) electrons (λ{sub SEE-e}). The peak n{sub e} and n{sub Ar+} were not a monotonic function of p{sub g}, resulting from the two conflicting effects of p{sub g} on n{sub e} and n{sub Ar+}. The impact of ions on the electrode was enhanced when p{sub g} increased. This was determined after comparing the results of ion energy distribution function (IEDFs) at various p{sub g}. The effects of t on the peaks and distributions of n{sub e} and n{sub Ar+} were negligible in the range of t from 1.0 to 3.0 mm. The minimum t of 0.6 mm for a steady glow discharge was predicted for p{sub g} of 800 Pa and V{sub rf} of 180 V. The Au vapor addition increased the peaks of n{sub e} and n{sub Ar+}, due to the lower ionization voltage of Au atom. The acceleration of ions in the sheaths was intensified with the addition of Au vapor because of the increased potential difference in the sheath at the drive electrode.

• OSTI ID: 22611645
• Journal Information: AIP Advances, Vol. 6, Issue 4; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACCELERATION
ATOMS
COMPARATIVE EVALUATIONS
DISTRIBUTION
DISTRIBUTION FUNCTIONS
ELECTRIC POTENTIAL
ELECTRON EMISSION
ELECTRONS
ENERGY SPECTRA
GLOW DISCHARGES
ION DENSITY
IONIZATION
IONS
MEAN FREE PATH
MICROWAVE RADIATION
SIMULATION
THREE-DIMENSIONAL CALCULATIONS
VAPORS