Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft x-ray region

Journal Article · Wed Jul 27 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4952917· OSTI ID:22608427

Koike, Masato; Imazono, Takashi ^[1]; Nagano, Tetsuya; Sasai, Hiroyuki; Oue, Yuki; Yonezawa, Zeno; Kuramoto, Satoshi ^[2]; Terauchi, Masami ^[3]; Takahashi, Hideyuki ^[4]; Notoya, Satoshi; Murano, Takanori ^[5]

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1. Quantum Beam Science Center, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215 Japan (Japan)
2. Device Dept., Shimadzu Corp., 1Nishinokyo-Kuwabara-cho, Nakagyo-ku, Kyoto 604-8511 Japan (Japan)
3. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 Japan (Japan)
4. Science Equipment Sales Dept., JEOL Ltd., 2-1-1 Ohtemachi, Chiyoda-ku, Tokyo 100-0004 Japan (Japan)
5. SA Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558 Japan (Japan)

Boron is the critical trace element in the production of high quality steel, creating a great demand for an efficient detection method of the B-K emission band at around 6.76 nm. To meet this demand we made a simulation study and obtained a practical method to improve the diffraction efficiency of metal-coated laminar-type gratings for a grazing incidence flat-field spectrograph by overcoating a sufficiently transparent high-density material. In the simulation the diffraction efficiency in a spectral region of 3.5-8.5 nm was computed for several combinations of overcoating materials and coating metals, with various thicknesses of the overcoating layer. The result obtained are: (1) the best overcoating material is high-density diamond-like carbon (DLC) having a density of 3.1 g/cm{sup 3}, (2) its optimum thickness is 24 nm at an angle of incidence of 87.0°, and (3) with this thickness the first-order diffraction efficiency is expected to reach 29.7 %, which well exceeds 15.6 % for Ni-coated (or 14.1 % for Au-coated) grating.

• OSTI ID: 22608427
• Journal Information: AIP Conference Proceedings, Vol. 1741, Issue 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BORON
DETECTION
DIAMONDS
DIFFRACTION
DIFFRACTION GRATINGS
EFFICIENCY
EMISSION
INCIDENCE ANGLE
LAYERS
METALS
SIMULATION
SOFT X RADIATION
STEELS
THICKNESS