Experimental evaluation of enhancement of diffraction efficiency by overcoating diamond-like carbon (DLC) on soft x-ray laminar-type gratings
- Quantum Beam Science Center, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215 (Japan)
- Device Department, Shimadzu Corp., 1 Nishinokyo-Kuwabara-cho, Nakagyo-ku, Kyoto 604-8511 (Japan)
- Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577 (Japan)
- Science Equipment Sales Dept., JEOL Ltd., 2-1-1 Ohtemachi, Chiyoda-ku, Tokyo 100-0004 (Japan)
- SA Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558 (Japan)
- Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Bldg. 2R0400, Berkeley, CA 94720-8199 (United States)
Efficiently detecting the B-K emission band around 6.76 nm from a trace concentration of boron in steel compounds has motivated a theoretical exploration of means of increasing the diffraction efficiency of a laminar grating with carbon overcoating. To experimentally evaluate this enhancement, a Ni grating was coated with a high-density carbon film, i.e., diamond-like carbon (DLC). The first order diffraction efficiencies of the Ni gratings coated with and without DLC were measured to be 25.8 % and 16.9 %, respectively, at a wavelength of 6.76 nm and an angle of incidence of 87.07°. The ratio of diffraction efficiency obtained experimentally vs. that calculated by numerical simulation is 0.87 for the DLC-coated Ni grating. The diffraction efficiency of a Ni grating coated with a low-density carbon film, amorphous carbon (a-C), was also slightly improved to be 19.6 %. Furthermore, a distinct minimum of the zeroth order lights of the two carbon-coated Ni gratings were observed at around 6.76 nm, which is coincident with the maximum of the first order light.
- OSTI ID:
- 22608425
- Journal Information:
- AIP Conference Proceedings, Vol. 1741, Issue 1; Conference: SRI2015: 12. international conference on synchrotron radiation instrumentation, New York, NY (United States), 6-10 Jul 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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