Structure evolution of zinc oxide thin films deposited by unbalance DC magnetron sputtering

Journal Article · Tue Apr 19 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4946942· OSTI ID:22606713

Aryanto, Didik ^[1]; Marwoto, Putut; Sugianto, ^[2]; Sudiro, Toto ^[1]; Birowosuto, Muhammad D. ^[1]; Sulhadi, ^[2]

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1. Research Center for Physics, Indonesian Institute of Sciences, Serpong 15314, Tangerang Selatan (Indonesia)
2. Physics Department, Faculty of Mathematics and Science, Universitas Negeri Semarang, Gunungpati, Semarang 50229 Jawa Tengah (Indonesia)

Zinc oxide (ZnO) thin films are deposited on corning glass substrates using unbalanced DC magnetron sputtering. The effect of growth temperature on surface morphology and crystallographic orientation of ZnO thin film is studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The surface morphology and crystallographic orientation of ZnO thin film are transformed against the increasing of growth temperature. The mean grain size of film and the surface roughness are inversely and directly proportional towards the growth temperature from room temperature to 300 °C, respectively. The smaller grain size and finer roughness of ZnO thin film are obtained at growth temperature of 400 °C. The result of AFM analysis is in good agreement with the result of XRD analysis. ZnO thin films deposited in a series of growth temperatures have hexagonal wurtzite polycrystalline structures and they exhibit transformations in the crystallographic orientation. The results in this study reveal that the growth temperature strongly influences the surface morphology and crystallographic orientation of ZnO thin film.

• OSTI ID: 22606713
• Journal Information: AIP Conference Proceedings, Vol. 1729, Issue 1; Conference: ISCPMS 2015: 1. international symposium on current progress in mathematics and sciences, Depok (Indonesia), 3-4 Nov 2015; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMIC FORCE MICROSCOPY
CRYSTAL GROWTH
CRYSTALLOGRAPHY
EVOLUTION
GLASS
GRAIN SIZE
MAGNETRONS
POLYCRYSTALS
ROUGHNESS
SPUTTERING
SUBSTRATES
SURFACES
TEMPERATURE RANGE 0273-0400 K
THIN FILMS
TRANSFORMATIONS
X RADIATION
X-RAY DIFFRACTION
ZINC OXIDES