Cross-sectional TEM specimen preparation for W/B{sub 4}C multilayer sample using FIB

Journal Article · Mon May 23 00:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4947820· OSTI ID:22606377

Mondal, Puspen; Pradhan, P. C.; Tiwari, Pragya; Srivastava, A. K. ^[1]

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1. Materials Research Lab, Indus Synchrotrons Utilization Division Raja Ramanna Centre for Advanced Technology, Indore 452 013,(M.P) (India)

A recent emergence of a cross-beam scanning electron microscopy (SEM)/focused-ion-beam (FIB) system have given choice to fabricate cross-sectional transmission electron microscopy (TEM) specimen of thin film multilayer sample. A 300 layer pair thin film multilayer sample of W/B{sub 4}C was used to demonstrate the specimen lift-out technique in very short time as compared to conventional cross-sectional sample preparation technique. To get large area electron transparent sample, sample prepared by FIB is followed by Ar{sup +} ion polishing at 2 kV with grazing incident. The prepared cross-sectional sample was characterized by transmission electron microscope.

• OSTI ID: 22606377
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1731; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
BORON CARBIDES
COMPARATIVE EVALUATIONS
ION BEAMS
LAYERS
SAMPLE PREPARATION
SCANNING ELECTRON MICROSCOPY
THIN FILMS
TRANSMISSION
TRANSMISSION ELECTRON MICROSCOPY
TUNGSTEN