Effective ionization coefficients, limiting electric fields, and electron energy distributions in CF{sub 3}I + CF{sub 4} + Ar ternary gas mixtures
- Department of Electrical Electronics Engineering, Gazi University, Ankara 06570 (Turkey)
- Department of Electrical Electronics Engineering, Near East University, Nicosia 99138 (Cyprus)
This paper reports on the effective ionization coefficients, limiting electric fields, electron energy distribution functions, and mean energies in ternary mixtures of (Trifluoroiodomethane) CF{sub 3}I + CF{sub 4} + Ar in the E/N range of 100–700 Td employing a two-term solution of the Boltzmann equation. In the ternary mixture, CF{sub 3}I component is increased while the CF{sub 4} component is reduced accordingly and the 40% Ar component is kept constant. It is seen that the electronegativity of the mixture increases with increased CF{sub 3}I content and effective ionization coefficients decrease while the limiting electric field values increase. Synergism in the mixture is also evaluated in percentage using the limiting electric field values obtained. Furthermore, it is possible to control the mean electron energy in the ternary mixture by changing the content of CF{sub 3}I component.
- OSTI ID:
- 22600062
- Journal Information:
- Physics of Plasmas, Vol. 23, Issue 7; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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