Measurement and analysis of electron-neutral collision frequency in the calibrated cutoff probe
- Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 34113 (Korea, Republic of)
- Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141 (Korea, Republic of)
- Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 34141 (Korea, Republic of)
As collisions between electrons and neutral particles constitute one of the most representative physical phenomena in weakly ionized plasma, the electron-neutral (e-n) collision frequency is a very important plasma parameter as regards understanding the physics of this material. In this paper, we measured the e-n collision frequency in the plasma using a calibrated cutoff-probe. A highly accurate reactance spectrum of the plasma/cutoff-probe system, which is expected based on previous cutoff-probe circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], is obtained using the calibrated cutoff-probe method, and the e-n collision frequency is calculated based on the cutoff-probe circuit model together with the high-frequency conductance model. The measured e-n collision frequency (by the calibrated cutoff-probe method) is compared and analyzed with that obtained using a Langmuir probe, with the latter being calculated from the measured electron-energy distribution functions, in wide range of gas pressure.
- OSTI ID:
- 22599083
- Journal Information:
- Physics of Plasmas, Vol. 23, Issue 3; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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