A micro-scale plasma spectrometer for space and plasma edge applications (invited)

Journal Article · Tue Nov 15 00:00:00 EST 2016 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4960145· OSTI ID:22596483

Keesee, A. M.; Elliott, D. ^[1]; Dugas, M.; Ellison, S.; Tersteeg, J.; Wagner, G. ^[2]; Barrie, A.; Rager, A. ^[3]

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1. Department of Physics, West Virginia University, Morgantown, West Virginia 26506-6315 (United States)
2. Advanced Research Corporation, White Bear Lake, Minnesota 55110 (United States)
3. NASA Goddard Space Flight Center, Greenbelt, Maryland 20771 (United States)

A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.

• OSTI ID: 22596483
• Journal Information: Review of Scientific Instruments, Vol. 87, Issue 11; Other Information: (c) 2016 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COLLIMATORS
DESIGN
DIAGRAMS
ELECTRON BEAMS
ELECTRONS
FIRST WALL
KEV RANGE 01-10
PLASMA
PLASMA PRODUCTION
PLATES
SILICON
SPECTROMETERS