Micromachined silicon-based analytical microinstruments for space science and planetary exploration

Conference · Thu Sep 01 04:00:00 EDT 1994

OSTI ID:10184716

Grunthaner, F J; Stalder, R E; Boumsellek, S; Van Zandt, T R; Kenny, T W; Hecht, M H; Ksendzov, A; Homer, M L; Terhune, R W; Lane, A L ^[1]

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1. and others

For future planetary science missions, the authors are developing a series of microinstruments using the techniques of silicon-based micromachining. Conventional instruments such as chemical sensors, charged particle analyzers and mass spectrometers are reduced in size and effective volume to the dimension of cubic centimeters, while maintaining or enhancing performance. Using wafer/wafer bonding techniques, selective chemical etching, thin Film growth, and high resolution lithography, complex three dimensional structures can be assembled. This paper discusses the design, implementation and performance of two new instruments: The Micromachined Bessel Box Auger Electron Spectrometer, and the Mars Soil Chemistry Experiment (MOx).

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: National Aeronautics and Space Administration, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 10184716
• Report Number(s): SAND--94-2293C; CONF-940857--1; ON: DE94019306
• Country of Publication: United States
• Language: English

Related Subjects

440800
47 OTHER INSTRUMENTATION
AUGER ELECTRON SPECTROSCOPY
DESIGN
MACHINING
MASS SPECTROMETERS
MISCELLANEOUS INSTRUMENTATION
SILICON
SPACE FLIGHT
SPECTROMETERS