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Generation of picosecond UV pulses by an Nd{sup 3+}:YAG laser for amplification in an ArF amplifier

Journal Article · · Quantum Electronics (Woodbury, N.Y.)
; ; ; ; ; ; ; ;  [1];  [2]
  1. A M Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
  2. Physics Instrumentation Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Troitsk, Moscow Region (Russian Federation)

The scheme generating UV pulses with a duration 15 ps and output energy up to 11.5 mJ is implemented in the system consisting of a picosecond Nd{sup 3+}:YAG laser with multistage nonlinearoptical conversion of fundamental frequency radiation into radiation with a wavelength 193 nm followed by an excimer ArF amplifier. The temporal characteristics and the contrast of the amplified pulses are measured. (lasers)

OSTI ID:
22551282
Journal Information:
Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 3 Vol. 45; ISSN 1063-7818
Country of Publication:
United States
Language:
English

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