Perpendicular coercivity enhancement of CoPt/TiN films by nitrogen incorporation during deposition

Journal Article · Sat Nov 28 04:00:00 EST 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4936365· OSTI ID:22492965

An, Hongyu; Harumoto, Takashi; Sannomiya, Takumi; Muraishi, Shinji; Nakamura, Yoshio; Shi, Ji ^[1]; Wang, Jian ^[2]; Szivos, Janos; Safran, Gyorgy ^[3]

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1. Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1, Ookayama, Meguro-ku, Tokyo 152-8552 (Japan)
2. National Institute for Materials Science (NIMS), Sengen 1-2-1, Tsukuba, Ibaraki 305-0047 (Japan)
3. Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Science, H-1121 Budapest, Konkoly-Thege ut 29-33 (Hungary)

The effect of N incorporation on the structure and magnetic properties of CoPt thin films deposited on glass substrates with TiN seed layers has been investigated. During the deposition of CoPt, introducing 20% N{sub 2} into Ar atmosphere promotes the (001) texture and enhances the perpendicular coercivity of CoPt film compared with the film deposited in pure Ar and post-annealed under the same conditions. From the in situ x-ray diffraction results, it is confirmed that N incorporation expands the lattice parameter of CoPt, which favors the epitaxial growth of CoPt on TiN. During the post-annealing process, N releases from CoPt film and promotes the L1{sub 0} ordering transformation of CoPt.

• OSTI ID: 22492965
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 20 Vol. 118; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ANNEALING
ARGON
COBALT COMPOUNDS
COERCIVE FORCE
CONTROLLED ATMOSPHERES
DEPOSITION
GLASS
LATTICE PARAMETERS
MAGNETIC PROPERTIES
NITROGEN
PLATINUM COMPOUNDS
TEXTURE
THIN FILMS
TITANIUM NITRIDES
X-RAY DIFFRACTION