WO{sub 3} thin film based multiple sensor array for electronic nose application
Journal Article
·
· AIP Conference Proceedings
- Thin Film Devices Section, Technical Physics Division, Bhabha Atomic Research Centre, Mumbai–400085 (India)
Multiple sensor array comprising 16 x 2 sensing elements were realized using RF sputtered WO{sub 3} thin films. The sensor films were modified with a thin layer of sensitizers namely Au, Ni, Cu, Al, Pd, Ti, Pt. The resulting sensor array were tested for their response towards different gases namely H{sub 2}S, NH{sub 3}, NO and C{sub 2}H{sub 5}OH. The sensor response values measured from the response curves indicates that the sensor array generates a unique signature pattern (bar chart) for the gases. The sensor response values can be used to get both qualitative and quantitative information about the gas.
- OSTI ID:
- 22490414
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1665; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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