Atomic characterization of Au clusters in vapor-liquid-solid grown silicon nanowires

Journal Article · Mon Sep 14 04:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4930143· OSTI ID:22489461

Chen, Wanghua; Roca i Cabarrocas, Pere ^[1]; Pareige, Philippe; Castro, Celia ^[2]; Xu, Tao; Grandidier, Bruno; Stiévenard, Didier ^[3]

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1. Laboratoire de Physique des Interfaces et Couches Minces (LPICM), UMR 7647, CNRS, Ecole Polytechnique, 91128 Palaiseau (France)
2. Groupe de Physique des Matériaux (GPM), Université et INSA de Rouen, UMR 6634, CNRS, Av. de l'Université, BP 12, 76801 Saint Etienne du Rouvray (France)
3. Institut d'Electronique et de Microélectronique et de Nanotechnologies (IEMN), UMR 8520, CNRS, Département ISEN, 41 bd Vauban, 59046 Lille Cedex (France)

By correlating atom probe tomography with other conventional microscope techniques (scanning electron microscope, scanning transmission electron microscope, and scanning tunneling microscopy), the distribution and composition of Au clusters in individual vapor-liquid-solid grown Si nanowires is investigated. Taking advantage of the characteristics of atom probe tomography, we have developed a sample preparation method by inclining the sample at certain angle to characterize the nanowire sidewall without using focused ion beam. With three-dimensional atomic scale reconstruction, we provide direct evidence of Au clusters tending to remain on the nanowire sidewall rather than being incorporated into the Si nanowires. Based on the composition measurement of Au clusters (28% ± 1%), we have demonstrated the supersaturation of Si atoms in Au clusters, which supports the hypothesis that Au clusters are formed simultaneously during nanowire growth rather than during the cooling process.

• OSTI ID: 22489461
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 118; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
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ION BEAMS
LIQUIDS
MICROSCOPES
NANOWIRES
PROBES
SAMPLE PREPARATION
SCANNING ELECTRON MICROSCOPY
SCANNING TUNNELING MICROSCOPY
SILICON
SOLIDS
SUPERSATURATION
TRANSMISSION ELECTRON MICROSCOPY
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