Vapor-liquid-solid growth of <110> silicon nanowire arrays

Journal Article · Thu Sep 19 04:00:00 EDT 2013 · Proceedings of SPIE - The International Society for Optical Engineering

DOI:https://doi.org/10.1117/12.2026825· OSTI ID:1149578

Eichfeld, Sarah M. ^[1]; Hainey, Jr., Mel F. ^[2]; Shen, Haoting ^[2]; Kendrick, Chito E. ^[2]; Fucinato, Emily A. ^[2]; Yim, Joanne ^[3]; Black, Marcie R. ^[3]; Redwing, Joan M. ^[2]

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1. Pennsylvania State Univ., University Park, PA (United States); Bandgap Engineering
2. Pennsylvania State Univ., University Park, PA (United States)
3. Bandgap Engineering Inc., Woburn, MA (United States)

The epitaxial growth of <110> silicon nanowires on (110) Si substrates by the vapor-liquid-solid growth process was investigated using SiCl₄ as the source gas. A high percentage of <110> nanowires was obtained at high temperatures and reduced SiCl₄ partial pressures. Transmission electron microscopy characterization of the <110> Si nanowires revealed symmetric V-shaped {111} facets at the tip and large {111} facets on the sidewalls of the nanowires. The symmetric {111} tip faceting was explained as arising from low catalyst supersaturation during growth which is expected to occur given the near-equilibrium nature of the SiCl₄ process. Furthermore, the predominance of {111} facets obtained under these conditions promotes the growth of <110> SiNWs.

• Research Organization: Bandgap Engineering Inc., Woburn, MA (United States)
• Sponsoring Organization: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Solar Energy Technologies Program (EE-2A)
• DOE Contract Number: EE0005323
• OSTI ID: 1149578
• Journal Information: Proceedings of SPIE - The International Society for Optical Engineering, Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Vol. 8820; ISSN 0277-786X
• Publisher: SPIE
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
VLS
nanofibers
silicon
silicon nanowires