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Vibration piezoelectric energy harvester with multi-beam

Journal Article · · AIP Advances
DOI:https://doi.org/10.1063/1.4919049· OSTI ID:22488523
; ;  [1];  [2];  [3]
  1. Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, 116024, Dalian, Liaoning Province (China)
  2. School of Electronic and Information Engineering, Dalian University of Technology, 116024, Dalian, Liaoning Province (China)
  3. State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, 100081, Beijing Province (China)

This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr{sub 0.53}Ti{sub 0.47})O{sub 3}) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 μC/cm{sup 2}, the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d{sub 33} is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency. .

OSTI ID:
22488523
Journal Information:
AIP Advances, Journal Name: AIP Advances Journal Issue: 4 Vol. 5; ISSN AAIDBI; ISSN 2158-3226
Country of Publication:
United States
Language:
English

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