Effects of molybdenum doping and thermal annealing on the physical properties of amorphous In–Zn–O films

Journal Article · Mon Jun 15 04:00:00 EDT 2015 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2015.02.039· OSTI ID:22475804

Liu, Shiu-Jen ^[1]; Wu, Kuei-Ching ^[1]; Peng, Kun-Cheng ^[2]

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1. Department of Mathematics and Science (Pre-college), National Taiwan Normal University, Linkou District, New Taipei City 244, Taiwan (China)
2. Department of Materials Engineering, Mingchi University of Technology, Taishan District, New Taipei City 243, Taiwan (China)

Highlights: • The effects of Mo doping and thermal annealing on a-IZO films were studied. • The carrier mobility of Mo-doped a-IZO films was enhanced by thermal annealing. • The optical bandgap of a-IZO films was unaffected by Mo doping. • Ferromagnetism was observed in Mo-doped a-IZO films after annealing. - Abstract: Amorphous In–Zn–O (a-IZO) films doped with Mo were prepared on glass substrates by using magnetron co-sputtering technique. The Mo concentration was controlled by varying the sputtering power applied on the Mo target. The effects of Mo doping and thermal annealing on the electrical, optical and magnetic properties of the a-IZO films were studied. The electrical properties of a-IZO films were found to be strongly affected by Mo doping and thermal annealing. The optical transmission near the absorption edge of a-IZO films is enhanced by Mo doping due to the decrease in reflection. The optical bandgap estimated to be 3.2 eV of a-IZO films is unaffected by Mo doping and thermal annealing. Moreover, some of Mo-doped films exhibit room-temperature ferromagnetism after annealing.

• OSTI ID: 22475804
• Journal Information: Materials Research Bulletin, Journal Name: Materials Research Bulletin Vol. 66; ISSN MRBUAC; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION
AMORPHOUS STATE
ANNEALING
CARRIER MOBILITY
DOPED MATERIALS
ELECTRICAL PROPERTIES
FERROMAGNETISM
FILMS
GLASS
INDIUM OXIDES
MAGNETIC PROPERTIES
MAGNETRONS
MOLYBDENUM ADDITIONS
OPTICAL PROPERTIES
REFLECTION
SPUTTERING
SUBSTRATES
TEMPERATURE RANGE 0273-0400 K
TRANSMISSION
ZINC OXIDES