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Title: Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution

Abstract

Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.

Authors:
; ; ; ; ; ; ;  [1]; ;  [2];  [1];  [3]
  1. Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395 (Japan)
  2. Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg (Germany)
  3. (CEMS), Wako 351-0198 (Japan)
Publication Date:
OSTI Identifier:
22412671
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 106; Journal Issue: 7; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CRYSTAL STRUCTURE; CRYSTALS; ELECTRIC POTENTIAL; ELECTROMAGNETIC FIELDS; ELECTRON EMISSION; FIELD EMISSION; FLUCTUATIONS; GALLIUM NITRIDES; GEOMETRICAL ABERRATIONS; LENSES; PERFORMANCE; TRANSMISSION ELECTRON MICROSCOPY

Citation Formats

Akashi, Tetsuya, Takahashi, Yoshio, Tanigaki, Toshiaki, E-mail: toshiaki.tanigaki.mv@hitachi.com, Shimakura, Tomokazu, Kawasaki, Takeshi, Furutsu, Tadao, Shinada, Hiroyuki, Osakabe, Nobuyuki, Müller, Heiko, Haider, Maximilian, Tonomura, Akira, and RIKEN Center for Emergent Matter Science. Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution. United States: N. p., 2015. Web. doi:10.1063/1.4908175.
Akashi, Tetsuya, Takahashi, Yoshio, Tanigaki, Toshiaki, E-mail: toshiaki.tanigaki.mv@hitachi.com, Shimakura, Tomokazu, Kawasaki, Takeshi, Furutsu, Tadao, Shinada, Hiroyuki, Osakabe, Nobuyuki, Müller, Heiko, Haider, Maximilian, Tonomura, Akira, & RIKEN Center for Emergent Matter Science. Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution. United States. doi:10.1063/1.4908175.
Akashi, Tetsuya, Takahashi, Yoshio, Tanigaki, Toshiaki, E-mail: toshiaki.tanigaki.mv@hitachi.com, Shimakura, Tomokazu, Kawasaki, Takeshi, Furutsu, Tadao, Shinada, Hiroyuki, Osakabe, Nobuyuki, Müller, Heiko, Haider, Maximilian, Tonomura, Akira, and RIKEN Center for Emergent Matter Science. Mon . "Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution". United States. doi:10.1063/1.4908175.
@article{osti_22412671,
title = {Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution},
author = {Akashi, Tetsuya and Takahashi, Yoshio and Tanigaki, Toshiaki, E-mail: toshiaki.tanigaki.mv@hitachi.com and Shimakura, Tomokazu and Kawasaki, Takeshi and Furutsu, Tadao and Shinada, Hiroyuki and Osakabe, Nobuyuki and Müller, Heiko and Haider, Maximilian and Tonomura, Akira and RIKEN Center for Emergent Matter Science},
abstractNote = {Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.},
doi = {10.1063/1.4908175},
journal = {Applied Physics Letters},
number = 7,
volume = 106,
place = {United States},
year = {Mon Feb 16 00:00:00 EST 2015},
month = {Mon Feb 16 00:00:00 EST 2015}
}