Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution
- Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395 (Japan)
- Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg (Germany)
Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.
- OSTI ID:
- 22412671
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 7 Vol. 106; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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