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Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4908175· OSTI ID:22412671
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  1. Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395 (Japan)
  2. Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg (Germany)

Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.

OSTI ID:
22412671
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 7 Vol. 106; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English