Texture evolution in nanocrystalline iron films deposited using biased magnetron sputtering

Journal Article · Sun Dec 21 04:00:00 EST 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4904077· OSTI ID:22402804

Vetterick, G.; Baldwin, J. K. ^[1]; Misra, A. ^[2]

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1. Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Los Alamos, New Mexico 87545 (United States)
2. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109 (United States)

Fe thin films were deposited on sodium chloride (NaCl) substrates using magnetron sputtering to investigate means of texture control in free standing metal films. The Fe thin films were studied using transmission electron microscopy equipped with automated crystallographic orientation microscopy. Using this technique, the microstructure of each film was characterized in order to elucidate the effects of altering deposition parameters. The natural tendency for Fe films grown on (100) NaCl is to form a randomly oriented nanocrystalline microstructure. By careful selection of substrate and deposition conditions, it is possible to drive the texture of the film toward a single (100) orientation while retaining the nanocrystalline microstructure.

• OSTI ID: 22402804
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 23 Vol. 116; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CRYSTALLOGRAPHY
CRYSTALS
DEPOSITION
DEPOSITS
IRON
MAGNETRONS
MICROSTRUCTURE
NANOSTRUCTURES
RANDOMNESS
SODIUM CHLORIDES
SPUTTERING
SUBSTRATES
TEXTURE
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY