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Title: Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas

Abstract

Driven vibrations of a nanoelectromechanical system based on GaAs/AlGaAs heterostructure containing two-dimensional electron gas are experimentally investigated. The system represents a conductive cantilever with the free end surrounded by a side gate. We show that out-of-plane flexural vibrations of the cantilever are driven when alternating signal biased by a dc voltage is applied to the in-plane side gate. We demonstrate that these vibrations can be on-chip linearly transduced into a low-frequency electrical signal using the heterodyne down-mixing method. The obtained data indicate that the dominant physical mechanism of the vibrations actuation is capacitive interaction between the cantilever and the gate.

Authors:
; ; ; ;  [1];  [2]; ;  [1]
  1. Rzhanov Institute of Semiconductor Physics, Novosibirsk 630090 (Russian Federation)
  2. (Russian Federation)
Publication Date:
OSTI Identifier:
22399018
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 106; Journal Issue: 18; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM ARSENIDES; DIRECT CURRENT; ELECTRIC POTENTIAL; ELECTRON GAS; GALLIUM ARSENIDES; HETEROJUNCTIONS; MECHANICAL VIBRATIONS; MIXING; NEMS; TWO-DIMENSIONAL SYSTEMS

Citation Formats

Shevyrin, A. A., E-mail: shevandrey@isp.nsc.ru, Pogosov, A. G., Bakarov, A. K., Rodyakina, E. E., Shklyaev, A. A., Novosibirsk State University, Novosibirsk 630090, Budantsev, M. V., and Toropov, A. I. Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas. United States: N. p., 2015. Web. doi:10.1063/1.4920932.
Shevyrin, A. A., E-mail: shevandrey@isp.nsc.ru, Pogosov, A. G., Bakarov, A. K., Rodyakina, E. E., Shklyaev, A. A., Novosibirsk State University, Novosibirsk 630090, Budantsev, M. V., & Toropov, A. I. Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas. United States. doi:10.1063/1.4920932.
Shevyrin, A. A., E-mail: shevandrey@isp.nsc.ru, Pogosov, A. G., Bakarov, A. K., Rodyakina, E. E., Shklyaev, A. A., Novosibirsk State University, Novosibirsk 630090, Budantsev, M. V., and Toropov, A. I. Mon . "Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas". United States. doi:10.1063/1.4920932.
@article{osti_22399018,
title = {Actuation and transduction of resonant vibrations in GaAs/AlGaAs-based nanoelectromechanical systems containing two-dimensional electron gas},
author = {Shevyrin, A. A., E-mail: shevandrey@isp.nsc.ru and Pogosov, A. G. and Bakarov, A. K. and Rodyakina, E. E. and Shklyaev, A. A. and Novosibirsk State University, Novosibirsk 630090 and Budantsev, M. V. and Toropov, A. I.},
abstractNote = {Driven vibrations of a nanoelectromechanical system based on GaAs/AlGaAs heterostructure containing two-dimensional electron gas are experimentally investigated. The system represents a conductive cantilever with the free end surrounded by a side gate. We show that out-of-plane flexural vibrations of the cantilever are driven when alternating signal biased by a dc voltage is applied to the in-plane side gate. We demonstrate that these vibrations can be on-chip linearly transduced into a low-frequency electrical signal using the heterodyne down-mixing method. The obtained data indicate that the dominant physical mechanism of the vibrations actuation is capacitive interaction between the cantilever and the gate.},
doi = {10.1063/1.4920932},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 18,
volume = 106,
place = {United States},
year = {2015},
month = {5}
}