Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Journal Article · Wed Apr 15 04:00:00 EDT 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4916617· OSTI ID:22392437

Goto, Takumi; Nakamori, Hiroki; Sano, Yasuhisa; Matsuyama, Satoshi ^[1]; Kimura, Takashi ^[2]; Kohmura, Yoshiki; Tamasaku, Kenji; Yabashi, Makina; Ishikawa, Tetsuya ^[3]; Yamauchi, Kazuto ^[1]

---

1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
2. Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021 (Japan)
3. SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198 (Japan)

An adaptive Kirkpatrick–Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.

• OSTI ID: 22392437
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 4 Vol. 86; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCURACY
COMPARATIVE EVALUATIONS
ELECTRIC POTENTIAL
ERRORS
FOCUSING
HARD X RADIATION
MIRRORS
OPTICS
PEAKS
PERFORMANCE
PIEZOELECTRICITY
SHAPE
SPRING-8 STORAGE RING
WAVELENGTHS