Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors
Journal Article
·
· Review of Scientific Instruments
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
- Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021 (Japan)
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198 (Japan)
An adaptive Kirkpatrick–Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
- OSTI ID:
- 22392437
- Journal Information:
- Review of Scientific Instruments, Vol. 86, Issue 4; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Optics fabrication and metrology for nanofocusing of hard x-rays
Stitching interferometry for ellipsoidal x-ray mirrors
Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy
Conference
·
Sun Jan 01 00:00:00 EST 2006
·
OSTI ID:22392437
+4 more
Stitching interferometry for ellipsoidal x-ray mirrors
Journal Article
·
Sun May 15 00:00:00 EDT 2016
· Review of Scientific Instruments
·
OSTI ID:22392437
+2 more
Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy
Journal Article
·
Fri Jan 19 00:00:00 EST 2007
· AIP Conference Proceedings
·
OSTI ID:22392437
+10 more