Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level

Journal Article · Fri Sep 15 04:00:00 EDT 2006 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2349594· OSTI ID:20853642

Matsuyama, S; Mimura, H; Yumoto, H; Hara, H; Yamamura, K; Sano, Y; Endo, K; Mori, Y; Yabashi, M; Nishino, Y; Tamasaku, K; Ishikawa, T; Yamauchi, K ^[1]

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1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)

X-ray focusing using Kirkpatrick-Baez (KB) mirrors is promising owing to their capability of highly efficient and energy-tunable focusing. We report the development of a mirror manipulator which enables KB mirror alignment with a high degree of accuracy. Mirror alignment tolerances were estimated using two types of simulators. On the basis of the simulation results, the mirror manipulator was developed to achieve an optimum KB mirror setup. As a result of focusing tests at BL29XUL of SPring-8, the beam size of 48x36 nm{sup 2} (VxH) was achieved in the full width at half maximum at an x-ray energy of 15 keV. Spatial resolution tests showed that a scanning x-ray microscope equipped with the KB focusing system could resolve line-and-space patterns of 80 nm linewidth in a high visibility of 60%.

• OSTI ID: 20853642
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 77; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
FOCUSING
HARD X RADIATION
KEV RANGE 10-100
MANIPULATORS
MICROSCOPES
MICROSCOPY
MIRRORS
OPTICS
SIMULATION
SIMULATORS
SPATIAL RESOLUTION
SPRING-8 STORAGE RING
TOLERANCE