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Title: Metal negative ion beam extraction from a radio frequency ion source

Abstract

A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and negative Cu ion beams have been tested. The ion beam current ratio of Cu{sup +} to Ar{sup +} has reached up to 140% when Ar was used as the discharge support gas. Cu{sup −} ion beam was observed at 50 W RF discharge power and at a higher Ar gas pressure in the ion source. Improvement of poor RF power matching and suppression of electron current is indispensable for a stable Cu{sup −} ion beam production from the source.

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
22391466
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1655; Journal Issue: 1; Conference: NIBS 2014: 4. International Symposium on Negative Ions, Beams and Sources, Garching (Germany), 6-10 Oct 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANIONS; ARGON IONS; BEAM CURRENTS; BEAM EXTRACTION; COPPER IONS; DESIGN; ELECTRIC DISCHARGES; ELECTRONS; ION BEAMS; ION SOURCES; MAGNETIC FIELDS; MAGNETRONS; MHZ RANGE; PLASMA; RADIOWAVE RADIATION; RF SYSTEMS; SPUTTERING

Citation Formats

Kanda, S., Yamada, N., Kasuya, T., Romero, C. F. P., and Wada, M.. Metal negative ion beam extraction from a radio frequency ion source. United States: N. p., 2015. Web. doi:10.1063/1.4916487.
Kanda, S., Yamada, N., Kasuya, T., Romero, C. F. P., & Wada, M.. Metal negative ion beam extraction from a radio frequency ion source. United States. doi:10.1063/1.4916487.
Kanda, S., Yamada, N., Kasuya, T., Romero, C. F. P., and Wada, M.. Wed . "Metal negative ion beam extraction from a radio frequency ion source". United States. doi:10.1063/1.4916487.
@article{osti_22391466,
title = {Metal negative ion beam extraction from a radio frequency ion source},
author = {Kanda, S. and Yamada, N. and Kasuya, T. and Romero, C. F. P. and Wada, M.},
abstractNote = {A metal ion source of magnetron magnetic field geometry has been designed and operated with a Cu hollow target. Radio frequency power at 13.56 MHz is directly supplied to the hollow target to maintain plasma discharge and induce self-bias to the target for sputtering. The extraction of positive and negative Cu ion beams have been tested. The ion beam current ratio of Cu{sup +} to Ar{sup +} has reached up to 140% when Ar was used as the discharge support gas. Cu{sup −} ion beam was observed at 50 W RF discharge power and at a higher Ar gas pressure in the ion source. Improvement of poor RF power matching and suppression of electron current is indispensable for a stable Cu{sup −} ion beam production from the source.},
doi = {10.1063/1.4916487},
journal = {AIP Conference Proceedings},
number = 1,
volume = 1655,
place = {United States},
year = {Wed Apr 08 00:00:00 EDT 2015},
month = {Wed Apr 08 00:00:00 EDT 2015}
}
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