High-speed deposition of titanium carbide coatings by laser-assisted metal–organic CVD

Journal Article · Thu Aug 01 04:00:00 EDT 2013 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2013.03.039· OSTI ID:22341713

Gong, Yansheng ^[1]; Tu, Rong ^[2]; Goto, Takashi ^[3]

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1. Faculty of Materials Science and Chemistry, China University of Geosciences, Wuhan 430074 (China)
2. State Key Laboratory of Advanced Technology for Material Synthesis and Processing, Wuhan University of Technology, Wuhan 430070 (China)
3. Institute for Materials Research, Tohoku University, Aoba-ku, 2-1-1 Katahira, Sendai 980-8577 (Japan)

Graphical abstract: - Highlights: • A semiconductor laser was first used to prepare wide-area LCVD-TiC{sub x} coatings. • The effect of laser power for the deposition of TiC{sub x} coatings was discussed. • TiC{sub x} coatings showed a columnar cross section and a dense surface texture. • TiC{sub x} coatings had a 1–4 order lower laser density than those of previous reports. • This study gives the possibility of LCVD applying on the preparation of TiC{sub x} coating. - Abstract: A semiconductor laser-assisted chemical vapor deposition (LCVD) of titanium carbide (TiC{sub x}) coatings on Al{sub 2}O{sub 3} substrate using tetrakis (diethylamido) titanium (TDEAT) and C{sub 2}H{sub 2} as source materials were investigated. The influences of laser power (P{sub L}) and pre-heating temperature (T{sub pre}) on the microstructure and deposition rate of TiC{sub x} coatings were examined. Single phase of TiC{sub x} coatings were obtained at P{sub L} = 100–200 W. TiC{sub x} coatings had a cauliflower-like surface and columnar cross section. TiC{sub x} coatings in the present study had the highest R{sub dep} (54 μm/h) at a relative low T{sub dep} than those of conventional CVD-TiC{sub x} coatings. The highest volume deposition rate (V{sub dep}) of TiC{sub x} coatings was about 4.7 × 10{sup −12} m{sup 3} s{sup −1}, which had 3–10{sup 5} times larger deposition area and 1–4 order lower laser density than those of previous LCVD using CO{sub 2}, Nd:YAG and argon ion laser.

• OSTI ID: 22341713
• Journal Information: Materials Research Bulletin, Journal Name: Materials Research Bulletin Journal Issue: 8 Vol. 48; ISSN MRBUAC; ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM OXIDES
ARGON IONS
BRASSICA
CHEMICAL VAPOR DEPOSITION
COATINGS
CROSS SECTIONS
DENSITY
ELECTRON MICROSCOPY
MICROSTRUCTURE
SUBSTRATES
SURFACE PROPERTIES
SURFACES
TITANIUM
TITANIUM CARBIDES