E→H mode transition density and power in two types of inductively coupled plasma configuration
- Department of Modern Physics, University of Science and Technology of China, Hefei, Anhui 230026 (China)
E → H transition power and density were investigated at various argon pressures in inductively coupled plasma (ICP) in a cylindrical interlaid chamber. The transition power versus the pressure shows a minimum transition power at 4 Pa (ν/ω=1) for argon. Then the transition density hardly changes at low pressures (ν/ω≪1), but it increases clearly when argon pressure exceeds an appropriate value. In addition, both the transition power and transition density are lower in the re-entrant configuration of ICP compared with that in the cylindrical configuration of ICP. The result may be caused from the decrease of stochastic heating in the re-entrant configuration of ICP. This work is useful to understand E → H mode transition and control the transition points in real plasma processes.
- OSTI ID:
- 22304102
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 7 Vol. 21; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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