Fluid simulation of the E-H mode transition in inductively coupled plasma

Journal Article · Wed Apr 15 04:00:00 EDT 2009 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3112009· OSTI ID:21357547

Shuxia, Zhao; Xiang, Xu; Xuechun, Li; Younian, Wang ^[1]

---

1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)

One self-consistent method combined with the electromagnetic theory and fluid model is developed to investigate the E-H mode transition of argon inductively coupled plasma (ICP) by adjusting the external electric parameters of the reactor. ICP dynamic characteristics of radial and axial space are also studied when E and H modes coexist. By regulating the radio-frequency current in the coil and voltage across the powered end of the coil and the ground, the E-H mode transition is observed, accompanied by the substantial variations in the electromagnetic field and plasma parameters (density, temperature, and deposited power). Besides, the evolution characteristics of ICP are examined when the discharge mechanism transforms from an E-mode dominated to an H-mode dominated.

• OSTI ID: 21357547
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 8 Vol. 105; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
CONFINEMENT
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTROMAGNETIC FIELDS
ELECTROMAGNETIC RADIATION
ELECTRON TEMPERATURE
ELEMENTS
FLUIDS
GASES
H-MODE PLASMA CONFINEMENT
INSTABILITY
ION TEMPERATURE
MAGNETIC CONFINEMENT
NONMETALS
PLASMA
PLASMA CONFINEMENT
PLASMA DENSITY
PLASMA INSTABILITY
PLASMA SIMULATION
RADIATIONS
RADIOWAVE RADIATION
RARE GASES
SIMULATION