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Low frequency noise in the unstable contact region of Au-to-Au microcontact for microelectromechanical system switches

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4886116· OSTI ID:22303396
;  [1];  [2]
  1. NOVITAS, Nanoelectronics Centre of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
  2. Temasek Laboratories at Nanyang Technological University, Research Techno Plaza, Singapore 637553 (Singapore)

The noise behavior of Au-to-Au microcontact for microelectromechanical system switches has been experimentally studied in the unstable contact region. The results suggest that the electrical conduction remains nonmetallic at the initial stage during contact formation due to the existence of alien films, and traps in the alien layer located at the contact interface could play an important role in determining the conduction noise. The conduction fluctuation induced by electron trapping-detrapping associated with the hydrocarbon layer is found to be an intrinsic noise source contributing to the low frequency noise in the unstable contact region.

OSTI ID:
22303396
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 25 Vol. 104; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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