Influence of oxygen pressure and aging on LaAlO{sub 3} films grown by pulsed laser deposition on SrTiO{sub 3} substrates
- London Centre for Nanotechnology, University College London, London WC1H 0AH (United Kingdom)
- Division of Physics and Applied Physics, Nanyang Technological University, Singapore 637371 (Singapore)
- Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal 23955-6900 (Saudi Arabia)
The crystal structures of LaAlO{sub 3} films grown by pulsed laser deposition on SrTiO{sub 3} substrates at oxygen pressure of 10{sup −3} millibars or 10{sup −5} millibars, where kinetics of ablated species hardly depend on oxygen background pressure, are compared. Our results show that the interface between LaAlO{sub 3} and SrTiO{sub 3} is sharper when the oxygen pressure is lower. Over time, the formation of various crystalline phases is observed while the crystalline thickness of the LaAlO{sub 3} layer remains unchanged. X-ray scattering as well as atomic force microscopy measurements indicate three-dimensional growth of such phases, which appear to be fed from an amorphous capping layer present in as-grown samples.
- OSTI ID:
- 22293096
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 8 Vol. 104; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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