Resonant x-ray reflectivity study of partial decomposed boron nitride thin films using Indus-1 synchrotron
Journal Article
·
· AIP Conference Proceedings
We determined the microstructural parameters and chemical composition profile of partial decomposed boron nitride thin films using x-ray reflectivity near the respective absorption edges. The elemental specificity and optical contrast variation properties of the resonant effect are utilized to combine chemical analysis with physical microstructure of thin films from x-ray scattered intensities. We demonstrated these aspects through calculations and experiments in the soft x-ray region near the boron K-absorption edge.
- OSTI ID:
- 22271063
- Journal Information:
- AIP Conference Proceedings, Vol. 1591, Issue 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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