skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Resonant x-ray reflectivity study of partial decomposed boron nitride thin films using Indus-1 synchrotron

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4872805· OSTI ID:22271063

We determined the microstructural parameters and chemical composition profile of partial decomposed boron nitride thin films using x-ray reflectivity near the respective absorption edges. The elemental specificity and optical contrast variation properties of the resonant effect are utilized to combine chemical analysis with physical microstructure of thin films from x-ray scattered intensities. We demonstrated these aspects through calculations and experiments in the soft x-ray region near the boron K-absorption edge.

OSTI ID:
22271063
Journal Information:
AIP Conference Proceedings, Vol. 1591, Issue 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English

Similar Records

Chemical selective microstructural analysis of thin film using resonant x-ray reflectivity
Journal Article · Sun Jul 14 00:00:00 EDT 2013 · Journal of Applied Physics · OSTI ID:22271063

Identification of B-K near edge x-ray absorption fine structure peaks of boron nitride thin films prepared by sputtering deposition
Journal Article · Wed Sep 15 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films · OSTI ID:22271063

Resonant Soft X-ray Reflectivity of Organic Thin Films: Capabilities and Limitations
Journal Article · Mon Jan 01 00:00:00 EST 2007 · Journal of Vacuum Sci. and Tech. A: Vacuum, Surfaces, and Films · OSTI ID:22271063