Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

Journal Article · Mon May 05 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4875981· OSTI ID:22269178

Liu, Ting-Wei; Wu, Tsung-Tsong ^[1]; Lin, Yu-Ching; Tsai, Yao-Chuan ^[2]; Ono, Takahito; Tanaka, Shuji ^[3]

---

1. Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan (China)
2. WPI-AIMR, Tohoku University, Sendai (Japan)
3. Department of Mechanical Engineering, Tohoku University, Sendai (Japan)

This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.

• OSTI ID: 22269178
• Journal Information: Applied Physics Letters, Vol. 104, Issue 18; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRON BEAMS
PHONONS
QUARTZ
SUBSTRATES
THIN FILMS
WAVE PROPAGATION