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Sharp semiconductor-to-metal transition of VO{sub 2} thin films on glass substrates

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4851655· OSTI ID:22267796
;  [1];  [2];  [1]
  1. Department of Electrical and Computer Engineering, Texas A and M University, College Station, Texas 77843-3128 (United States)
  2. Material Science and Engineering Program, Texas A and M University, College Station, Texas 77843-3128 (United States)
Outstanding phase transition properties of vanadium dioxide (VO{sub 2}) thin films on amorphous glass were achieved and compared with the ones grown on c-cut sapphire and Si (111) substrates, all by pulsed laser deposition. The films on glass substrate exhibit a sharp semiconductor-to-metal transition (∼4.3 °C) at a near bulk transition temperature of ∼68.4 °C with an electrical resistance change as high as 3.2 × 10{sup 3} times. The excellent phase transition properties of the films on glass substrate are correlated with the large grain size and low defects density achieved. The phase transition properties of VO{sub 2} films on c-cut sapphire and Si (111) substrates were found to be limited by the high defect density.
OSTI ID:
22267796
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 24 Vol. 114; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English