Fabrication and optical properties of non-polar III-nitride air-gap distributed Bragg reflector microcavities

Journal Article · Mon Nov 11 04:00:00 EST 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4832069· OSTI ID:22254039

Tao, Renchun; Kako, Satoshi ^[1]; Arita, Munetaka ^[2]; Arakawa, Yasuhiko ^[1]

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1. Institute for Industrial Science, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo 153-8505 (Japan)
2. Institute for Nano Quantum Information Electronics, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo 153-8505 (Japan)

Using the thermal decomposition technique, non-polar III-nitride air-gap distributed Bragg reflector (DBR) microcavities (MCs) with a single quantum well have been fabricated. Atomic force microscopy reveals a locally smooth DBR surface, and room-temperature micro-photoluminescence measurements show cavity modes. There are two modes per cavity due to optical birefringence in the non-polar MCs, and a systematic cavity mode shift with cavity thickness was also observed. Although the structures consist of only 3 periods (top) and 4 periods (bottom), a quality factor of 1600 (very close to the theoretical value of 2100) reveals the high quality of the air-gap DBR MCs.

• OSTI ID: 22254039
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 20 Vol. 103; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AIR
ATOMIC FORCE MICROSCOPY
FABRICATION
OPTICAL PROPERTIES
PHOTOLUMINESCENCE
PYROLYSIS
QUALITY FACTOR
QUANTUM WELLS
SURFACES