Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams

Journal Article · Mon Dec 09 00:00:00 EST 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4846415· OSTI ID:22253793

Wetzel, Benjamin; Xie, Chen; Lacourt, Pierre-Ambroise; Dudley, John M.; Courvoisier, Francois ^[1]

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1. Département d'Optique P.M. Duffieux, Institut FEMTO-ST, UMR–6174 CNRS, Université de Franche-Comté, 25030 Besançon (France)

We report the fabrication of micro and nano-disks in single layer chemical vapor deposition graphene on glass substrate using femtosecond laser ablation with vortex Bessel beams. The fabricated graphene disks with diameters ranging from 650 nm to 4 μm were characterized by spatially resolved micro-Raman spectroscopy. The variation of ablation threshold was investigated as a function of the number of pulses showing an incubation effect. A very high degree of size control of the fabricated graphene disks is enabled using a sequence of femtosecond pulses with different vortex orders.

• OSTI ID: 22253793
• Journal Information: Applied Physics Letters, Vol. 103, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
ABLATION
BEAMS
CHEMICAL VAPOR DEPOSITION
CONTROL
FABRICATION
GLASS
GRAPHENE
LASERS
PULSES
RAMAN SPECTROSCOPY
SUBSTRATES
VORTICES