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Title: High aspect ratio nanochannel machining using single shot femtosecond Bessel beams

Abstract

We report high aspect ratio nanochannel fabrication in glass using single-shot femtosecond Bessel beams of sub-3 {mu}J pulse energies at 800 nm. We obtain near-parallel nanochannels with diameters in the range 200-800 nm, and aspect ratios that can exceed 100. An array of 230 nm diameter channels with 1.6 {mu}m pitch illustrates the reproducibility of this approach and the potential for writing periodic structures. We also report proof-of-principle machining of a through-channel of 400 nm diameter in a 43 {mu}m thick membrane. These results represent a significant advance of femtosecond laser ablation technology into the nanometric regime.

Authors:
; ; ; ; ; ;  [1]
  1. Departement d'Optique P. M. Duffieux, Institut FEMTO-ST, UMR 6174, CNRS-Universite de Franche-Comte, 16 route de Gray, 25030 Besancon Cedex (France)
Publication Date:
OSTI Identifier:
21466899
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 97; Journal Issue: 8; Other Information: DOI: 10.1063/1.3479419; (c) 2010 American Institute of Physics; Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ABLATION; ASPECT RATIO; FABRICATION; GLASS; LASER RADIATION; MACHINING; MEMBRANES; NANOSTRUCTURES; PERIODICITY; PITCHES; PULSED IRRADIATION; DIMENSIONLESS NUMBERS; ELECTROMAGNETIC RADIATION; IRRADIATION; ORGANIC COMPOUNDS; OTHER ORGANIC COMPOUNDS; RADIATIONS; VARIATIONS

Citation Formats

Bhuyan, M K, Courvoisier, F, Lacourt, P A, Jacquot, M, Salut, R, Furfaro, L, and Dudley, J M. High aspect ratio nanochannel machining using single shot femtosecond Bessel beams. United States: N. p., 2010. Web. doi:10.1063/1.3479419.
Bhuyan, M K, Courvoisier, F, Lacourt, P A, Jacquot, M, Salut, R, Furfaro, L, & Dudley, J M. High aspect ratio nanochannel machining using single shot femtosecond Bessel beams. United States. doi:10.1063/1.3479419.
Bhuyan, M K, Courvoisier, F, Lacourt, P A, Jacquot, M, Salut, R, Furfaro, L, and Dudley, J M. Mon . "High aspect ratio nanochannel machining using single shot femtosecond Bessel beams". United States. doi:10.1063/1.3479419.
@article{osti_21466899,
title = {High aspect ratio nanochannel machining using single shot femtosecond Bessel beams},
author = {Bhuyan, M K and Courvoisier, F and Lacourt, P A and Jacquot, M and Salut, R and Furfaro, L and Dudley, J M},
abstractNote = {We report high aspect ratio nanochannel fabrication in glass using single-shot femtosecond Bessel beams of sub-3 {mu}J pulse energies at 800 nm. We obtain near-parallel nanochannels with diameters in the range 200-800 nm, and aspect ratios that can exceed 100. An array of 230 nm diameter channels with 1.6 {mu}m pitch illustrates the reproducibility of this approach and the potential for writing periodic structures. We also report proof-of-principle machining of a through-channel of 400 nm diameter in a 43 {mu}m thick membrane. These results represent a significant advance of femtosecond laser ablation technology into the nanometric regime.},
doi = {10.1063/1.3479419},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 8,
volume = 97,
place = {United States},
year = {2010},
month = {8}
}