Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Patent · Tue Jul 04 04:00:00 EDT 2023

OSTI ID:2221948

An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE; National Aeronautics and Space Administration (NASA)

Assignee:: The Board of Trustees of the University of Illinois (Urbana, IL)

Patent Number(s):: 11,693,180

Application Number:: 17/377,305

OSTI ID:: 2221948

Country of Publication:: United States

Language:: English

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