Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Rao, Ashutosh; Patil, Aniket; Chiles, Jeff; Malinowski, Marcin; Novak, Spencer; Richardson, Kathleen; Rabiei, Payam; Fathpour, Sasan

doi:10.1364/OE.23.022746

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Journal Article · Thu Aug 20 00:00:00 EDT 2015 · Optics Express

DOI:https://doi.org/10.1364/OE.23.022746· OSTI ID:1224859

Rao, Ashutosh ^[1]; Patil, Aniket ^[2]; Chiles, Jeff ^[3]; Malinowski, Marcin ^[3]; Novak, Spencer ^[4]; Richardson, Kathleen ^[4]; Rabiei, Payam ^[2]; Fathpour, Sasan ^[3]

Univ. of Central Florida, Orlando, FL (United States); Partow Technologies LLC
Partow Technologies LLC, Orlando, FL (United States)
Univ. of Central Florida, Orlando, FL (United States)
Univ. of Central Florida, Orlando, FL (United States); Clemson Univ., Clemson, SC (United States)

In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge₂₃Sb₇S₇₀, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 10⁵ quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.

View Accepted Manuscript (DOE)

Research Organization:: Partow Technologies LLC, Orlando, FL (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: SC0013245

OSTI ID:: 1224859

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 17 Vol. 23; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

References (30)

Silicon optical modulators Reed, G. T.; Mashanovich, G.; Gardes, F. Y. Nature Photonics, Vol. 4, Issue 8 https://doi.org/10.1038/nphoton.2010.179	journal	July 2010
Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding Rabiei, Payam; Gunter, Peter Applied Physics Letters, Vol. 85, Issue 20 https://doi.org/10.1063/1.1819527	journal	November 2004
Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators Vorobiev, A.; Berge, J.; Gevorgian, S. Journal of Applied Physics, Vol. 110, Issue 2 https://doi.org/10.1063/1.3610513	journal	July 2011
Low-loss, submicron chalcogenide integrated photonics with chlorine plasma etching Chiles, Jeff; Malinowski, Marcin; Rao, Ashutosh Applied Physics Letters, Vol. 106, Issue 11 https://doi.org/10.1063/1.4916207	journal	March 2015
Optical waveguide parabolic coupling horns Burns, W. K.; Milton, A. F.; Lee, A. B. Applied Physics Letters, Vol. 30, Issue 1 https://doi.org/10.1063/1.89199	journal	January 1977
Proton exchange for high‐index waveguides in LiNbO ₃ Jackel, J. L.; Rice, C. E.; Veselka, J. J. Applied Physics Letters, Vol. 41, Issue 7 https://doi.org/10.1063/1.93615	journal	October 1982
Characterization of frequency dispersion in Ti‐indiffused lithium niobate optical devices Nightingale, J. L.; Becker, R. A.; Willis, P. C. Applied Physics Letters, Vol. 51, Issue 10 https://doi.org/10.1063/1.98898	journal	September 1987
Low‐frequency acoustic anomalies in lithium niobate Mach–Zehnder interferometers Jungerman, R. L.; Flory, C. A. Applied Physics Letters, Vol. 53, Issue 16 https://doi.org/10.1063/1.99970	journal	October 1988
A review of lithium niobate modulators for fiber-optic communications systems Wooten, E. L.; Kissa, K. M.; Yi-Yan, A. IEEE Journal of Selected Topics in Quantum Electronics, Vol. 6, Issue 1 https://doi.org/10.1109/2944.826874	journal	January 2000
Millimeter-wave Ti:LiNbO/sub 3/ optical modulators Noguchi, K.; Mitomi, O.; Miyazawa, H. Journal of Lightwave Technology, Vol. 16, Issue 4 https://doi.org/10.1109/50.664072	journal	April 1998
Silicon Photonics Jalali, Bahram; Fathpour, Sasan Journal of Lightwave Technology, Vol. 24, Issue 12 https://doi.org/10.1109/JLT.2006.885782	journal	December 2006
40 GBd 16QAM Signaling at 160 Gb/s in a Silicon-Organic Hybrid Modulator Lauermann, Matthias; Wolf, Stefan; Schindler, Philipp C. Journal of Lightwave Technology, Vol. 33, Issue 6 https://doi.org/10.1109/JLT.2015.2394211	journal	March 2015
Velocity-matching techniques for integrated optic traveling wave switch/modulators Alferness, R.; Korotky, S.; Marcatili, E. IEEE Journal of Quantum Electronics, Vol. 20, Issue 3 https://doi.org/10.1109/JQE.1984.1072377	journal	March 1984
Electrooptical effects in silicon Soref, R.; Bennett, B. IEEE Journal of Quantum Electronics, Vol. 23, Issue 1 https://doi.org/10.1109/JQE.1987.1073206	journal	January 1987
High Performance Mach–Zehnder-Based Silicon Optical Modulators Thomson, David J.; Gardes, Frederic Y.; Liu, Sheng IEEE Journal of Selected Topics in Quantum Electronics, Vol. 19, Issue 6 https://doi.org/10.1109/JSTQE.2013.2264799	journal	November 2013
Silicon photonics for compact, energy-efficient interconnects [Invited] Barwicz, T.; Byun, H.; Gan, F. Journal of Optical Networking, Vol. 6, Issue 1 https://doi.org/10.1364/JON.6.000063	journal	January 2007
High-speed, low-loss silicon Mach–Zehnder modulators with doping optimization Xiao, Xi; Xu, Hao; Li, Xianyao Optics Express, Vol. 21, Issue 4 https://doi.org/10.1364/OE.21.004116	journal	January 2013
Submicron optical waveguides and microring resonators fabricated by selective oxidation of tantalum Rabiei, Payam; Ma, Jichi; Khan, Saeed Optics Express, Vol. 21, Issue 6 https://doi.org/10.1364/OE.21.006967	journal	January 2013
50-Gb/s silicon optical modulator with traveling-wave electrodes Tu, Xiaoguang; Liow, Tsung-Yang; Song, Junfeng Optics Express, Vol. 21, Issue 10 https://doi.org/10.1364/OE.21.012776	journal	January 2013
Heterogeneous lithium niobate photonics on silicon substrates Rabiei, Payam; Ma, Jichi; Khan, Saeed Optics Express, Vol. 21, Issue 21 https://doi.org/10.1364/OE.21.025573	journal	January 2013
125 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes Chen, Li; Wood, Michael G.; Reano, Ronald M. Optics Express, Vol. 21, Issue 22 https://doi.org/10.1364/OE.21.027003	journal	January 2013
Compact 1D-silicon photonic crystal electro-optic modulator operating with ultra-low switching voltage and energy Shakoor, Abdul; Nozaki, Kengo; Kuramochi, Eiichi Optics Express, Vol. 22, Issue 23 https://doi.org/10.1364/OE.22.028623	journal	January 2014
Highly linear ring modulator from hybrid silicon and lithium niobate Chen, Li; Chen, Jiahong; Nagy, Jonathan Optics Express, Vol. 23, Issue 10 https://doi.org/10.1364/OE.23.013255	journal	January 2015
Compact efficient broadband grating coupler for silicon-on-insulator waveguides Taillaert, Dirk; Bienstman, Peter; Baets, Roel Optics Letters, Vol. 29, Issue 23 https://doi.org/10.1364/OL.29.002749	journal	January 2004
Hybrid Si-LiNbO_3 microring electro-optically tunable resonators for active photonic devices Lee, Yoo Seung; Kim, Gun-Duk; Kim, Woo-Ju Optics Letters, Vol. 36, Issue 7 https://doi.org/10.1364/OL.36.001119	journal	January 2011
Bandwidth–length trade-off figures of merit for electro-optic traveling wave modulators Ibarra Fuste, Jose A.; Santos Blanco, Maria C. Optics Letters, Vol. 38, Issue 9 https://doi.org/10.1364/OL.38.001548	journal	January 2013
Low-loss and high index-contrast tantalum pentoxide microring resonators and grating couplers on silicon substrates Rabiei, Payam; Rao, Ashutosh; Chiles, Jeff Optics Letters, Vol. 39, Issue 18 https://doi.org/10.1364/OL.39.005379	journal	January 2014
Mid-infrared integrated waveguide modulators based on silicon-on-lithium-niobate photonics Chiles, Jeff; Fathpour, Sasan Optica, Vol. 1, Issue 5 https://doi.org/10.1364/OPTICA.1.000350	journal	January 2014
Recent breakthroughs in carrier depletion based silicon optical modulators Reed, Graham T.; Mashanovich, Goran Z.; Gardes, Frederic Y. Nanophotonics, Vol. 3, Issue 4-5 https://doi.org/10.1515/nanoph-2013-0016	journal	August 2014
Emerging heterogeneous integrated photonic platforms on silicon Fathpour, Sasan Nanophotonics, Vol. 4, Issue 1 https://doi.org/10.1515/nanoph-2014-0024	journal	May 2015

Cited By (14)

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits Boes, Andreas; Corcoran, Bill; Chang, Lin Laser & Photonics Reviews, Vol. 12, Issue 4 https://doi.org/10.1002/lpor.201700256	journal	February 2018
Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate Wang, Xiaoxi; Weigel, Peter O.; Zhao, Jie APL Photonics, Vol. 4, Issue 9 https://doi.org/10.1063/1.5115243	journal	September 2019
Design of nanobeam photonic crystal resonators for a silicon-on-lithium-niobate platform Witmer, Jeremy D.; Hill, Jeff T.; Safavi-Naeini, Amir H. Optics Express, Vol. 24, Issue 6 https://doi.org/10.1364/oe.24.005876	journal	January 2016
Nanophotonic lithium niobate electro-optic modulators Wang, Cheng; Zhang, Mian; Stern, Brian Optics Express, Vol. 26, Issue 2 https://doi.org/10.1364/oe.26.001547	journal	January 2018
Phase tuning by length contraction Jin, Warren; Polcawich, Ronald G.; Morton, Paul A. Optics Express, Vol. 26, Issue 3 https://doi.org/10.1364/oe.26.003174	journal	January 2018
Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth Weigel, Peter O.; Zhao, Jie; Fang, Kelvin Optics Express, Vol. 26, Issue 18 https://doi.org/10.1364/oe.26.023728	journal	January 2018
Towards subterahertz bandwidth ultracompact lithium niobate electrooptic modulators Honardoost, Amirmahdi; Juneghani, Farzaneh Arab; Safian, Reza Optics Express, Vol. 27, Issue 5 https://doi.org/10.1364/oe.27.006495	journal	January 2019
Realization of alignment-tolerant grating couplers for z-cut thin-film lithium niobate Kar, Arunita; Bahadori, Meisam; Gong, Songbin Optics Express, Vol. 27, Issue 11 https://doi.org/10.1364/oe.27.015856	journal	January 2019
Actively-monitored periodic-poling in thin-film lithium niobate photonic waveguides with ultrahigh nonlinear conversion efficiency of 4600 %W ⁻¹ cm ⁻² Rao, Ashutosh; Abdelsalam, Kamal; Sjaardema, Tracy Optics Express, Vol. 27, Issue 18 https://doi.org/10.1364/oe.27.025920	journal	January 2019
High-performance and linear thin-film lithium niobate Mach–Zehnder modulators on silicon up to 50 GHz Rao, Ashutosh; Patil, Aniket; Rabiei, Payam Optics Letters, Vol. 41, Issue 24 https://doi.org/10.1364/ol.41.005700	journal	January 2016
Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator Ahmed, Abu Naim R.; Shi, Shouyuan; Zablocki, Mathew Optics Letters, Vol. 44, Issue 3 https://doi.org/10.1364/ol.44.000618	journal	January 2019
Monolithic ultra-high-Q lithium niobate microring resonator Zhang, Mian; Wang, Cheng; Cheng, Rebecca Optica, Vol. 4, Issue 12 https://doi.org/10.1364/optica.4.001536	journal	January 2017
Ultra-high electro-optic activity demonstrated in a silicon-organic hybrid modulator Kieninger, Clemens; Kutuvantavida, Yasar; Elder, Delwin L. Optica, Vol. 5, Issue 6 https://doi.org/10.1364/optica.5.000739	journal	January 2018
Ultra-High Electro-Optic Activity Demonstrated in a Silicon-Organic Hybrid (SOH) Modulator Kieninger, Clemens; Kutuvantavida, Yasar; Elder, Delwin L. arXiv https://doi.org/10.48550/arxiv.1709.06338	text	January 2017

Similar Records

110 GHz, 110 mW hybrid silicon-lithium niobate Mach-Zehnder modulator

Journal Article · Thu Nov 03 00:00:00 EDT 2022 · Scientific Reports · OSTI ID:2471760

Buried-Electrode Hybrid Bonded Thin-Film Lithium Niobate Electro-Optic Mach-Zehnder Modulators

Journal Article · Wed Apr 19 00:00:00 EDT 2023 · IEEE Photonics Technology Letters · OSTI ID:2311749

A nanosecond-scale shift-and-dump Mach-Zehnder switch

Journal Article · Tue Aug 27 00:00:00 EDT 2019 · Optics Letters · OSTI ID:1559109

Related Subjects

42 ENGINEERING
integrated optics
integrated optoelectronic circuits
lithium niobate
modulators
optoelectronics

Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon

Citation Formats

References (30)

Cited By (14)

Similar Records

Related Subjects