Study on the effect of target on plasma parameters of magnetron sputtering discharge plasma

Journal Article · Tue Oct 15 04:00:00 EDT 2013 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4825235· OSTI ID:22218574

Saikia, P.; Kakati, B.; Saikia, B. K. ^[1]

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1. Centre of Plasma Physics, Institute for Plasma Research, Nazirakhat, Sonapur-782 402, Kamrup, Assam (India)

In this study, the effect of magnetron target on different plasma parameters of Argon/Hydrogen (Ar - H{sub 2}) direct current (DC) magnetron discharge is examined. Here, Copper (Cu) and Chromium (Cr) are used as magnetron targets. The value of plasma parameters such as electron temperature (kT{sub e}), electron density (N{sub e}), ion density (N{sub i}), degree of ionization of Ar, and degree of dissociation of H{sub 2} for both the target are studied as a function of input power and hydrogen content in the discharge. The plasma parameters are determined by using Langmuir probe and Optical emission spectroscopy. On the basis of the different reactions in the gas phase, the variation of plasma parameters and sputtering rate are explained. The obtained results show that electron and ion density decline with gradual addition of Hydrogen in the discharge and increase with rising input power. It brings significant changes on the degree of ionization of Ar and dissociation of H{sub 2}. The enhanced value of electron density (N{sub e}), ion density (N{sub i}), degree of Ionization of Ar, and degree of dissociation of H{sub 2} for Cr compared to Cu target is explained on the basis of it's higher Ion Induced Secondary Electron Emission Coefficient (ISEE) value.

• OSTI ID: 22218574
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 20; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CHROMIUM
COMPARATIVE EVALUATIONS
COPPER
ELECTRON DENSITY
ELECTRON EMISSION
ELECTRON TEMPERATURE
ELECTRONS
EMISSION SPECTROSCOPY
GLOW DISCHARGES
HYDROGEN
ION DENSITY
ION TEMPERATURE
IONIZATION
LANGMUIR PROBE
MOLECULES
PLASMA DENSITY
PLASMA DIAGNOSTICS
WALL EFFECTS