Spectroscopy diagnostic of dual-frequency capacitively coupled CHF{sub 3}/Ar plasma

Journal Article · Fri Nov 15 00:00:00 EST 2013 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.4828397· OSTI ID:22218454

Liu, Wen-Yao; Du, Yong-Quan ^[1]; Liu, Yong-Xin; Liu, Jia; Zhao, Tian-Liang; Wang, You-Nian ^[2]; Xu, Yong; Li, Xiao-Song; Zhu, Ai-Min ^[1]

---

1. Laboratory of Plasma Physical Chemistry, Dalian University of Technology, Dalian 116024 (China)
2. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)

A combined spectroscopic method of absorption, actinometry, and relative optical emission intensity is employed to determine the absolute CF{sub 2} density, the relative F and H densities, H atom excitation temperature and the electron density in dual-frequency (60/2 MHz) capacitively coupled CHF{sub 3}/Ar plasmas. The effects of different control parameters, such as high-frequency (HF) power, low-frequency (LF) power, gas pressure, gap length and content of CHF{sub 3}, on the concentration of radical CF{sub 2}, F, and H and excitation temperature are discussed, respectively. It is found that the concentration of CF{sub 2} is strongly dependent on the HF power, operating pressure and the proportion of CHF{sub 3} in feed gas, while it is almost independent of the LF power and the gap length. A higher concentration ratio of F to CF{sub 2} could be obtained in dual-frequency discharge case. Finally, the generation and decay mechanisms of CF{sub 2} and F were also discussed.

• OSTI ID: 22218454
• Journal Information: Physics of Plasmas, Vol. 20, Issue 11; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
74 ATOMIC AND MOLECULAR PHYSICS
ARGON
ATOMS
CARBON COMPOUNDS
CONCENTRATION RATIO
ELECTRON DENSITY
ELECTRON TEMPERATURE
EMISSION SPECTROSCOPY
EXCITATION
EXCITED STATES
FLUORINE
FLUOROFORM
HYDROGEN
ION TEMPERATURE
MHZ RANGE
PHOTON-ATOM COLLISIONS
PHOTON-MOLECULE COLLISIONS
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA PRESSURE