Effects of temperature on ZnO hybrids grown by metal-organic chemical vapor deposition
- Materials Science and Engineering, Korea University, Anam-dong 5-1, Seongbuk-gu, Seoul 136-713 (Korea, Republic of)
The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure and temperature. Vertically aligned ZnO nanorods were grown on c-plane of sapphire substrate at 600 °C and 400 Torr. ZnO film was then formed in situ on the ZnO nanorods at 100, 600, and 700 °C and 10 Torr. High-resolution X-ray diffraction measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 3–5 μm by field-emission scanning electron microscopy. The hybrid formed at 600 °C showed better crystalline quality those formed at 100 °C or 700 °C. These structures have potential applicability as nanobuilding blocks in nanodevices.
- OSTI ID:
- 22215516
- Journal Information:
- Materials Research Bulletin, Journal Name: Materials Research Bulletin Journal Issue: 10 Vol. 47; ISSN MRBUAC; ISSN 0025-5408
- Country of Publication:
- United States
- Language:
- English
Similar Records
Polarity control of ZnO films grown on nitrided c-sapphire by molecular-beam epitaxy
Buffer-enhanced room-temperature growth and characterization of epitaxial ZnO thin films