Synthesis, crystal structure and thermal decomposition of [La{sub 2}(CH{sub 3}CH{sub 2}COO){sub 6}.(H{sub 2}O){sub 3}].3.5H{sub 2}O precursor for high-k La{sub 2}O{sub 3} thin films deposition

Journal Article · Wed Sep 15 00:00:00 EDT 2010 · Materials Research Bulletin

DOI:https://doi.org/10.1016/J.MATERRESBULL.2010.05.019· OSTI ID:22207378

Nasui, M.; Petrisor, T.; Mos, R. B.; Gabor, M. S. ^[1]; Varga, R. A. ^[2]; Petrisor, T. ^[1]

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1. Materials Science Laboratory, Technical University of Cluj-Napoca, Str. C. Daicoviciu 15, Cluj-Napoca (Romania)
2. Faculty of Chemistry and Chemical Engineering, Babes-Bolyai University, Cluj-Napoca (Romania)

Lanthanum acetylacetonate La(C{sub 5}H{sub 7}O{sub 2}){sub 3}.xH{sub 2}O has been used in the preparation of the precursor solution for the deposition of polycrystalline La{sub 2}O{sub 3} thin films on Si(1 1 1) single crystalline substrates. The precursor chemistry of the as-prepared coating solution, precursor powder and precursor single crystal have been investigated by Fourier Transformed Infrared Spectroscopy (FTIR), differential thermal analysis coupled with quadrupole mass spectrometry (TG-DTA-QMS) and X-ray diffraction. The FTIR and X-ray diffraction analyses have revealed the complex nature of the coating solution due to the formation of a lanthanum propionate complex. The La{sub 2}O{sub 3} thin films deposited by spin coating on Si(1 1 1) substrate exhibit good morphological and structural properties. The films heat treated at 800 {sup o}C crystallize in a hexagonal phase with the lattice parameters a = 3,89 A and c = 6.33 A, while at 900 {sup o}C the films contain both the hexagonal and cubic La{sub 2}O{sub 3} phase.

• OSTI ID: 22207378
• Journal Information: Materials Research Bulletin, Vol. 45, Issue 9; Other Information: Copyright (c) 2010 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA); ISSN 0025-5408
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CRYSTAL STRUCTURE
DEPOSITS
DIFFERENTIAL THERMAL ANALYSIS
FOURIER TRANSFORM SPECTROMETERS
FOURIER TRANSFORMATION
HEAT TREATMENTS
INFRARED SPECTRA
LANTHANUM
LANTHANUM OXIDES
LATTICE PARAMETERS
MASS SPECTROSCOPY
MONOCRYSTALS
POLYCRYSTALS
POWDERS
PRECURSOR
PYROLYSIS
SUBSTRATES
THERMAL GRAVIMETRIC ANALYSIS
THIN FILMS
X-RAY DIFFRACTION