Growth and characterization of thin films of Y sub 2 O sub 3 , La sub 2 O sub 3 and La sub 2 CuO sub 4

Journal Article · Fri Feb 01 00:00:00 EST 1991 · Journal of Solid State Chemistry; (USA)

DOI:https://doi.org/10.1016/0022-4596(91)90138-8· OSTI ID:5691485

Gao, Y-M; Wu, P; Dwight, K; Wold, A ^[1]

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1. Brown Univ., Providence, RI (USA)

Films of Y{sub 2}O{sub 3}, La{sub 2}O{sub 3}, and La{sub 2}CuO{sub 4} were prepared by an ultrasonic nebulization and pyrolysis method using acetylacetonates of the corresponding metals in alcohol solvents as source materials. Homogeneous, uniform films with good adherence have been obtained using this simple technique. As-deposited yttrium and lanthanum oxide films were poorly crystallized. After postannealing in oxygen at higher temperature, they crystallized into cubic and hexagonal phases, respectively. Transparent yttrium and lanthanum oxide films have high electric breakdown voltages. Single phase polycrystalline La{sub 2}CuO{sub 4} thin films were obtained from a source solution with a La:Cu ratio of 2:1.

• OSTI ID: 5691485
• Journal Information: Journal of Solid State Chemistry; (USA), Vol. 90:2; ISSN 0022-4596
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COPPER OXIDES
CHEMICAL PREPARATION
ELECTRIC CONDUCTIVITY
LANTHANUM OXIDES
YTTRIUM OXIDES
DATA ANALYSIS
EXPERIMENTAL DATA
LATTICE PARAMETERS
MEASURING METHODS
THIN FILMS
CHALCOGENIDES
COPPER COMPOUNDS
DATA
ELECTRICAL PROPERTIES
FILMS
INFORMATION
LANTHANUM COMPOUNDS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
SYNTHESIS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360204 - Ceramics
Cermets
& Refractories- Physical Properties