Direct and alignment-insensitive measurement of cantilever curvature

Journal Article · Mon Jul 15 00:00:00 EDT 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4813265· OSTI ID:22122829

Hermans, Rodolfo I.; Aeppli, Gabriel ^[1]; Bailey, Joe M. ^[1]

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1. London Centre for Nanotechnology, University College London, London (United Kingdom)

We analytically derive and experimentally demonstrate a method for the simultaneous measurement of deflection for large arrays of cantilevers. The Fresnel diffraction patterns of a cantilever independently reveal tilt, curvature, cubic, and higher order bending of the cantilever. It provides a calibrated absolute measurement of the polynomial coefficients describing the cantilever shape, without careful alignment and could be applied to several cantilevers simultaneously with no added complexity. We show that the method is easily implemented, works in both liquid media and in air, for a broad range of displacements and is especially suited to the requirements for multi-marker biosensors.

• OSTI ID: 22122829
• Journal Information: Applied Physics Letters, Vol. 103, Issue 3; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
AIR
CALIBRATION
DIFFRACTION
POLYNOMIALS