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Atomic resolution mapping of interfacial intermixing and segregation in InAs/GaSb superlattices: A correlative study

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4794193· OSTI ID:22102297
; ;  [1];  [2]; ;  [3]
  1. Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois 61801 (United States)
  2. CEA/INAC/SP2M/LEMMA, 19 rue des Martyrs, 38 054 Grenoble (France)
  3. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
We combine quantitative analyses of Z-contrast images with composition analyses employing atom probe tomography (APT) correlatively to provide a quantitative measurement of atomic scale interfacial intermixing in an InAs/GaSb superlattice (SL). Contributions from GaSb and InAs in the Z-contrast images are separated using an improved image processing technique. Correlation with high resolution APT composition analyses permits an examination of interfacial segregation of both cations and anions and their incorporation in the short period InAs/GaSb SL. Results revealed short, intermediate, and long-range intermixing of In, Ga, and Sb during molecular beam epitaxial growth and their distribution in the SL.
OSTI ID:
22102297
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 113; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English