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Atomic intermixing in short-period InAs/GaSb superlattices

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4729058· OSTI ID:22080387
; ; ;  [1]; ;  [2]
  1. Department of Materials Engineering, Technion - Israel Institute of Technology, Haifa 32000 (Israel)
  2. Department of Materials Science and Engineering and Northwestern University Center for Atom-Probe Tomography, Northwestern University, Evanston, Illinois 60208 (United States)
High-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) and laser-assisted local-electrode atom-probe (LEAP) tomography are utilizing for characterizing short-period InAs/GaSb superlattices with an emphasis on obtaining the atomic concentration profiles with sub-nm resolution. HAADF-STEM permits direct visualization and counting of atomic columns in individual sub-layers. The spatial resolution of HAADF-STEM is sufficient to resolve the anion-cation dumbbells and, on this basis, to follow the atomic distributions across a superlattice. Both methods confirm that InAs-on-GaSb interfaces are wider than GaSb-on-InAs interfaces. The interfacial widths deduced from LEAP tomographic measurements are slightly larger than those extracted from HAADF-STEM micrographs, with the maximum total width not exceeding 4.5 monolayers. LEAP tomographic analysis shows the presence of about 7 at. % of Sb atoms in the middle of the InAs sub-layers, as a result of As/Sb substitutions during growth.
OSTI ID:
22080387
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 24 Vol. 100; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English