Electric field-tunable Ba{sub x}Sr{sub 1-x}TiO{sub 3} films with high figures of merit grown by molecular beam epitaxy
- Materials Department, University of California, Santa Barbara, California 93106-5050 (United States)
We report on the dielectric properties of Ba{sub x}Sr{sub 1-x}TiO{sub 3} (BST) films grown by molecular beam epitaxy on epitaxial Pt bottom electrodes. Paraelectric films (x Less-Than-Or-Equivalent-To 0.5) exhibit dielectric losses that are similar to those of BST single crystals and ceramics. Films with device quality factors greater than 1000 and electric field tunabilities exceeding 1:5 are demonstrated. The results provide evidence for the importance of stoichiometry control and the use of a non-energetic deposition technique for achieving high figures of merit of tunable devices with BST thin films.
- OSTI ID:
- 22089632
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 25 Vol. 101; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
In-plane dielectric properties of epitaxial Ba{sub 0.7}Sr{sub 0.3}TiO{sub 3} thin films grown on GaAs for tunable device application
Improvements in tunability of (Ba{sub 0.5}Sr{sub 0.5})TiO{sub 3} thin films by use of metalorganic chemical vapor deposited (Ba,Sr)RuO{sub 3} interfacial layers
Effect of bottom electrode on dielectric property of sputtered-(Ba,Sr)TiO{sub 3} films
Journal Article
·
Sat Sep 01 00:00:00 EDT 2012
· Journal of Applied Physics
·
OSTI ID:22089433
Improvements in tunability of (Ba{sub 0.5}Sr{sub 0.5})TiO{sub 3} thin films by use of metalorganic chemical vapor deposited (Ba,Sr)RuO{sub 3} interfacial layers
Journal Article
·
Mon Aug 13 00:00:00 EDT 2001
· Applied Physics Letters
·
OSTI ID:40230778
Effect of bottom electrode on dielectric property of sputtered-(Ba,Sr)TiO{sub 3} films
Journal Article
·
Sun Mar 15 00:00:00 EDT 2009
· Journal of Applied Physics
·
OSTI ID:21190070